Physike Technology Co., Ltd. 
         
        ZrON? Cryogenic Temperature Sensor
        ZrON? cryogenic temperature sensors are not only characterized by high sensitivity, fast thermal response, wide operating temperature range, good thermal cycle repeatability and high mechanical strength, but also have the advantages of low magnetic reluctance, radiation-resistant, and low annual drift, which can be widely used in cryogenic/ultra-low temperature systems, superconducting magnet systems, gas pedals, colliders, synchrotron light sources, advanced light sources, neutron sources, high-energy physics, astronomical telescopes, cosmic microwave background radiation detection and quantum computation.
        The temperature sensing unit of the ZrON? cryogenic sensor is a ZrON film grown by reactive magnetron sputtering. By adjusting the ratio of nitrogen oxides in the reactive magnetron sputtering and the growth temperature to regulate the temperature response range of the ZrON film, combined with the advanced lithography technology and encapsulation process, it is capable of realizing the full coverage of the temperature range from 100 mK to 425 K. 
        ZrON? cryogenic sensors are available in three standard packages, SD, Bobbin and Can, and are classified into four models, ZrON-10, ZrON-50, ZrON-70 and ZrON-80, depending on the resistance range and operating temperature zone. Typical temperature accuracies are: ±5mK@1K; ±5mK @4.2K, ±15mK@77K and ±50mK@300K.









        Typical Characteristics
        ü Low magnetic reluctance
        ü High sensitivity      
        ü Large operating temperature range
        ü High-energy radiation resistance
        ü High mechanical strength
        ü Excellent thermal cycle repeatability
        ü Fast thermal response
        ü Low annual drift





        Recommended Operating Temperature Range 
        Calibrated temperature range
        ZrON-10
        1K-325K(option：100mK lower limit)
        950mK-325K(option：280mKand 100mK lower limit)
        ZrON-50
        1.5K-325K(Option: 425K upper limit)
        1.2K-325K(Option: 425K upper limit)
        ZrON-70
        2K-325K(Option: 425K upper limit)
        1.8K-325K(Option: 425K upper limit)
        ZrON-80
        2.5K-325K(Option: 425K upper limit)
        2K-325K(Option: 425K upper limit)
         
         








        Typical resistance-temperature curves for ZrON-10 cryogenic temperature sensors




        Typical sensitivity-temperature curves for ZrON-10 cryogenic temperature sensors



        Typical dimensionless sensitivity-temperature curves for ZrON-10 cryogenic temperature sensors



        Typical temperature errors (ΔT/T%) associated with magnetic fields for ZrON-10 cryogenic temperature sensors






         
        Table of Typical Temperature Errors (ΔT/T%) Associated with Magnetic Fields for ZrON?-10 Cryogenic Temperature Sensors

        1T
        2T
        3T
        4T
        5T
        6T
        7T
        8T
        9T
        10T
        11T
        12T
        13T
        14T
        1.45K
        0.34
        1.19
        2.49
        3.46
        4.16
        4.79
        5.44
        6.06
        6.69
        7.29
        7.94
        8.57
        9.26
        9.94
        2.5K
        0.28
        1.05
        1.66
        1.86
        1.94
        2.13
        2.32
        2.52
        2.71
        3.09
        3.47
        3.92
        4.40
        4.95
        4.2K
        0.05
        0.08
        0.11
        0.13
        0.16
        0.18
        0.24
        0.30
        0.36
        0.47
        0.59
        0.68
        0.77
        0.90









        Comparison of typical temperature errors (ΔT/T%) associated with magnetic fields for three cryogenic temperature sensors: ZrON-10, CX-1010, CX-1050



        Typical Temperature Errors (ΔT/T%) Associated with Magnetic Fields for ZrON-50, 70 and 80 cryogenic temperature sensors




        Typical Resistance Temperature Curves for ZrON-50, 70 and 80 Cryogenic Temperature Sensors



        Typical Sensitivity Temperature Curves for ZrON-50, 70 and 80 Cryogenic Temperature Sensors




        Typical Dimensionless Sensitivity Temperature Curves for ZrON-50, 70 and 80 Cryogenic Temperature Sensors






         
        Table of Typical Temperature Errors (ΔT/T%) Associated with Magnetic Fields at 1.5 K for Three Cryogenic Temperature Sensors, ZrON-50, 70, and 80.

        1T
        2T
        3T
        4T
        5T
        6T
        7T
        8T
        9T
        ZrON-50
        0.504
        1.402
        1.934
        2.253
        2.4862
        2.752
        3.052
        3.398
        3.797
        ZrON-70
        0.272
        0.788
        1.054
        1.154
        1.234
        1.353
        1.546
        1.812
        2.138
        ZrON-80
        0.024
        0.081
        -0.108
        -0.407
        -0.400
        -0.860
        -0.953
        -0.933
        -0.860
         




        SD package


        Low magnetic reluctance
        Mass:25mg
        Hermetic Ceramic Package
        Ultra-high vacuum compatible
        Size: 2mm×3.2mm×1.2mm
        Two gold-plated copper pins





        Bobbin package

        Low magnetic reluctance
        Mass:1.0g (excluding leads)
        Size: 8mm diameter, 5mm height
        Two pairs of four-color wires (red, green, natural and blue), 36AWG phosphor bronze twisted, length 1m, polyimide insulation





        Can package

        Low magnetic reluctance
        Mass:0.38g (excluding leads)
        Canister Package
        Size: 3mm diameter, Length: 8mm
        Two pairs of four-color wire (red, green, natural and blue), 36 AWG phosphor bronze twisted, length 1m, polyimide insulation


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